Mobility enhancement of MOSFETs on p-silicon (111) with in situ HF-vapor pre-gate oxide cleaning

Tien-Sheng Chao*, Yu Hsin Lin, Wen Luh Yang

*此作品的通信作者

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds