Mix-and-match lithography technology on 6-in. wafers for nanofabrication

Keyphrases

• Wafer 100%
• Lithography Technology 100%
• Device Fabrication 100%
• Nanofabrication 100%
• Stepper 100%
• Mix-and-match 100%
• G-line 100%
• Electron Beam 50%
• High-resolution 50%
• Electron Beam Lithography 50%
• High-throughput 50%
• Nanometer Scale 50%
• Pattern-based Approach 50%
• Resist Pattern 50%
• Lithography System 50%
• Device Pattern 50%

Engineering

• Lithography 100%
• Nanofabrication Process 100%
• High Resolution 50%
• Nanometre 50%
• Beam Lithography 50%
• Device Wafer 50%
• Patterning Process 50%

Material Science

• Lithography 100%
• Device Fabrication 66%