Microwave coplanar filters on Si substrates

K. T. Chan; Albert Chin; J. T. Kuo; Chi-Yang Chang; D. S. Duh; W. J. Lin; Chunxiang Zhu; M. F. Li; Dim Lee Kwong

doi:10.1109/MWSYM.2003.1210531

Microwave coplanar filters on Si substrates

K. T. Chan^*, Albert Chin, J. T. Kuo, Chi-Yang Chang, D. S. Duh, W. J. Lin, Chunxiang Zhu, M. F. Li, Dim Lee Kwong

^*此作品的通信作者

電機工程學系

研究成果 › 同行評審

6 引文斯高帕斯（Scopus）

摘要

The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter.

原文	American English
頁（從 - 到）	1909-1912
頁數	4
期刊	IEEE MTT-S International Microwave Symposium Digest
卷	3
DOIs	https://doi.org/10.1109/MWSYM.2003.1210531
出版狀態	Published - 2003
事件	2003 IEEE MTT-S International Microwave Symposium Digest - Philadelphia, PA, 美國持續時間: 8 6月 2003 → 13 6月 2003

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10.1109/MWSYM.2003.1210531

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title = "Microwave coplanar filters on Si substrates",

abstract = "The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter.",

author = "Chan, {K. T.} and Albert Chin and Kuo, {J. T.} and Chi-Yang Chang and Duh, {D. S.} and Lin, {W. J.} and Chunxiang Zhu and Li, {M. F.} and Kwong, {Dim Lee}",

year = "2003",

doi = "10.1109/MWSYM.2003.1210531",

language = "American English",

volume = "3",

pages = "1909--1912",

journal = "IEEE MTT-S International Microwave Symposium Digest",

issn = "0149-645X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "2003 IEEE MTT-S International Microwave Symposium Digest ; Conference date: 08-06-2003 Through 13-06-2003",

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TY - JOUR

T1 - Microwave coplanar filters on Si substrates

AU - Chan, K. T.

AU - Chin, Albert

AU - Kuo, J. T.

AU - Chang, Chi-Yang

AU - Duh, D. S.

AU - Lin, W. J.

AU - Zhu, Chunxiang

AU - Li, M. F.

AU - Kwong, Dim Lee

PY - 2003

Y1 - 2003

N2 - The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter.

AB - The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter.

UR - http://www.scopus.com/inward/record.url?scp=0042591617&partnerID=8YFLogxK

U2 - 10.1109/MWSYM.2003.1210531

DO - 10.1109/MWSYM.2003.1210531

M3 - Conference article

AN - SCOPUS:0042591617

SN - 0149-645X

VL - 3

SP - 1909

EP - 1912

JO - IEEE MTT-S International Microwave Symposium Digest

JF - IEEE MTT-S International Microwave Symposium Digest

T2 - 2003 IEEE MTT-S International Microwave Symposium Digest

Y2 - 8 June 2003 through 13 June 2003

ER -

Microwave coplanar filters on Si substrates

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