Microlens array fabricated by excimer laser micromachining with gray-tone photolithography

Keyphrases

• Photolithography 100%
• Microlens Array 100%
• Excimer Laser Micromachining 100%
• Numerical Aperture 33%
• Knife-edge 33%
• Maximum Deviation 33%
• Information Processing 33%
• Optical Data Storage 33%
• Optical Interconnections 33%
• Solid Immersion Lens 33%
• Exposure Method 33%
• 248 Nm Excimer Laser 33%
• Hemispherical Lens 33%
• Thermal Melting 33%
• Scan Test 33%
• Melting Process 33%
• Effective Aperture 33%
• Gray-tone Mask 33%
• Coded Mask 33%
• Exposure Process 33%
• Precorrection 33%
• Edge Imaging 33%

Engineering

• Micro-Lens Array 100%
• Excimer Laser 100%
• Optical Lithography 100%
• Laser Micromachining 100%
• Numerical Aperture 66%
• Experimental Result 33%
• One Step 33%
• Optical Interconnection 33%
• Refractive 33%
• Melting Process 33%