METASTABLE Au-Si ALLOYS FORMATION INDUCED BY ION-BEAM INTERFACE MIXING.

B. Y. Tsaur*, J. W. Mayer, M. A. Nicolet, King-Ning Tu

*此作品的通信作者

研究成果: Paper同行評審

6 引文 斯高帕斯(Scopus)

摘要

An amorphous alloy with a composition Au-28. 5 at. % Si (Au//5Si//2) has been formed by implanting energetic Xe, Ar and Ne ions through a thin layer of Au deposited on a Si substrate. The amorphous alloy phase was unstable at temperatures above 100 degree C and transformed into a metastable crystalline phase with a hexagonal crystal structure. This metastable phase then decomposed into an equilibrium mixture of Au and Si at higher annealing temperatures ( greater than 180 degree C). The sequential decomposition of the amorphous and metastable phases were also observed at room temperature but during several weeks. The atomic mechanisms involved in interface mixing are discussed. The results are compared with those obtained by rapid quenching techniques and thermal treatment of Au films on single crystal Si substrates.

原文English
頁面142-151
頁數10
DOIs
出版狀態Published - 1 1月 1980
事件Ion Implantation Metall, Proc of a Symp at Annu Meet of the Mater Res Soc - Cambridge, MA, Engl
持續時間: 30 11月 197930 11月 1979

Conference

ConferenceIon Implantation Metall, Proc of a Symp at Annu Meet of the Mater Res Soc
城市Cambridge, MA, Engl
期間30/11/7930/11/79

指紋

深入研究「METASTABLE Au-Si ALLOYS FORMATION INDUCED BY ION-BEAM INTERFACE MIXING.」主題。共同形成了獨特的指紋。

引用此