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MEMS Using CMOS Wafer
Weileun Fang, Sheng Shian Li,
Yi Chiu
, Ming Huang Li
電機工程學系
研究成果
:
Chapter
›
同行評審
7
引文 斯高帕斯（Scopus）
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深入研究「MEMS Using CMOS Wafer」主題。共同形成了獨特的指紋。
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Keyphrases
Accelerometer Sensor
12%
Back-end-of-line
12%
Budget Constraint
12%
Complementary Metal Oxide Semiconductor
100%
Complementary Metal-oxide-semiconductor Technology
25%
Fabrication Technology
12%
IC Technology
12%
Infrared Sensor
12%
Limited Sensors
12%
Micro-electro-mechanical Systems
100%
Monolithic Integration
25%
Multilayer Thin Films
12%
Multiple Sensors
12%
Multiplexed Sensing
12%
Operating Concept
12%
Pressure Sensor
12%
Process Module
37%
Resonant Sensor
12%
Resonator
12%
Semiconductor Process
37%
Semiconductor Wafer
100%
Sensing Circuit
25%
Silicon Substrate
12%
Tactile Sensor
12%
Thermal Budget
12%
Wafer
12%
Engineering
Accelerometer Sensor
10%
Complementary Metal-Oxide-Semiconductor
100%
Infrared Sensor
10%
Micro-Electro-Mechanical System
100%
Monolithic Integration
20%
Multiple Sensor
10%
Pressure Sensor
10%
Realization
10%
Resonator
20%
Silicon Substrate
10%
Thin Films
10%
Material Science
Accelerometer
10%
Complementary Metal-Oxide-Semiconductor Device
100%
Electronic Circuit
10%
Microelectromechanical System
100%
Resonator
20%
Silicon
10%
Thin Films
10%