MEMS-based miniature optical pickup

Yi Chiu; Cheng-Huan Chen; Jin-Chern Chiou; Weileun Fang; Han Ping D. Shieh

doi:10.1109/TMAG.2004.842077

MEMS-based miniature optical pickup

Yi Chiu^*, Cheng-Huan Chen, Jin-Chern Chiou, Weileun Fang, Han Ping D. Shieh

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研究成果: Article › 同行評審

8 引文斯高帕斯（Scopus）

摘要

The technology challenges for miniature optical pickups include high-numerical-aperture objective lens design, servo actuator functions and performance, and component assembly tolerance. In this paper, a microelectromechanical systems (MEMS)-based miniature optical pickup is proposed for DVD and blue disk systems. A high-order diffractive objective lens with a continuous surface relief is designed. Focus, tilt, and tracking servos are implanted with MEMS micro actuators. Preliminary design and test results are presented.

原文	English
頁（從 - 到）	967-970
頁數	4
期刊	IEEE Transactions on Magnetics
卷	41
發行號	2
DOIs	https://doi.org/10.1109/TMAG.2004.842077
出版狀態	Published - 2月 2005

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10.1109/TMAG.2004.842077

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AU - Chen, Cheng-Huan

AU - Chiou, Jin-Chern

AU - Fang, Weileun

AU - Shieh, Han Ping D.

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KW - Diffractive optical element

KW - Microelectromechanical system (MEMS)

KW - Micromirror

KW - Optical pickup

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MEMS-based miniature optical pickup

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