Mechanisms and characteristics of oxide charge detrapping in n-MOSFET's

Ta-Hui Wang*, Tse En Chang, Lu Ping Chiang, Chimoon Huang, Jyh-Chyurn Guo


研究成果: Conference article同行評審

3 引文 斯高帕斯(Scopus)


Oxide charge detrapping is monitored for the first time using a GIDL current. An analytical model accounting for the temporal evolution of the GIDL current has been developed. Two oxide trap discharging mechanisms, electron detrapping and hot hole injection, have been separately demonstrated. The field dependence of the detrapping times confirms that the electron detrapping is via field enhanced tunneling. Finally, the possibility of using this method to probe oxide trap growth characteristics under various hot carrier stress conditions has been shown.

頁(從 - 到)232-233
期刊Digest of Technical Papers - Symposium on VLSI Technology
出版狀態Published - 1 1月 1996
事件Proceedings of the 1996 Symposium on VLSI Technology - Honolulu, HI, USA
持續時間: 11 6月 199613 6月 1996


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