TY - GEN
T1 - Measuring the deflection of the cantilever in atomic force microscope with an optical pickup system
AU - Lin, Meng Hu
AU - Hung, Shao-Kang
AU - Huang, Sheng-Chieh
AU - Fu, Li Chen
PY - 2006/12/1
Y1 - 2006/12/1
N2 - This paper is to present the development and the verification of a compact optical sensor system for measuring the deflection of the cantilever in a tapping-mode atomic force microscope (AFM). An optical pickup head of commercial digital versatile disc read only memory (DVD-ROM) drive is applied in this sensor system. In order to satisfy the strict measuring requirements of sensibility and reliability, the build-in detection system is replaced with a four-quadrant photodiode of traditional optical-lever technique. In addition, an inertial motor composed by a piezo-actuator is used as the sample approaching mechanism and the scanner in the vertical direction. Thus, the volume of hardware structure is decreased, and the sensing variance due to temperature change will be minimized. The developed AFM system is well functionally verified by measuring a calibration grating with step height 19.5 nm, and the vertical resolution is ±8 nm.
AB - This paper is to present the development and the verification of a compact optical sensor system for measuring the deflection of the cantilever in a tapping-mode atomic force microscope (AFM). An optical pickup head of commercial digital versatile disc read only memory (DVD-ROM) drive is applied in this sensor system. In order to satisfy the strict measuring requirements of sensibility and reliability, the build-in detection system is replaced with a four-quadrant photodiode of traditional optical-lever technique. In addition, an inertial motor composed by a piezo-actuator is used as the sample approaching mechanism and the scanner in the vertical direction. Thus, the volume of hardware structure is decreased, and the sensing variance due to temperature change will be minimized. The developed AFM system is well functionally verified by measuring a calibration grating with step height 19.5 nm, and the vertical resolution is ±8 nm.
UR - http://www.scopus.com/inward/record.url?scp=39649124491&partnerID=8YFLogxK
U2 - 10.1109/CDC.2006.377088
DO - 10.1109/CDC.2006.377088
M3 - Conference contribution
AN - SCOPUS:39649124491
SN - 1424401712
SN - 9781424401710
T3 - Proceedings of the IEEE Conference on Decision and Control
SP - 592
EP - 596
BT - Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC
T2 - 45th IEEE Conference on Decision and Control 2006, CDC
Y2 - 13 December 2006 through 15 December 2006
ER -