Manufacturing-oriented environment for synthesis of fabrication processes

John S. Wenstrand*, Hiroshi Iwai, Robert W. Dutton

*此作品的通信作者

研究成果: Conference contribution同行評審

7 引文 斯高帕斯(Scopus)

摘要

The process design Aid (PDA), a design environment which bridges the gap between design and specification of semiconductor fabrication processes, is presented. The PDA, for the first time, uses a hierarchical process model supporting reuse of well-characterized process fragments, integrates design goals with process and simulation data in a single knowledge base, and provides direct support for the numerical optimization of process parameters and simulator calibration parameters. Details of a hierarchical, object-oriented process representation are discussed. Process objects provide high-level building blocks for process design, focusing attention on critical design parameters and supplying default values for other parameters. Spectral editors for process objects, simulation objects, mask data, and process flows; a menu-driven interface; and online documentation make the PDA easy to use. Results of modeling a 0.8-μm BiCMOS process with the PDA are presented, demonstrating automatic generation of consistent simulation and manufacturing specifications, efficient incremental simulation, and fast, interactive, closed-loop optimization of process parameters. 89% of the process parameters required for the BiCMOS process were supplied as defaults by the PDA process library. Incremental simulation greatly accelerated optimization of the width of a transistor base.

原文English
主出版物標題IEEE Int Conf Comput Aided Des ICCAD 89 Dig Tech Pap
編輯 Anon
發行者Publ by IEEE
頁面376-379
頁數4
ISBN(列印)0818659866
DOIs
出版狀態Published - 11月 1989
事件IEEE International Conference on Computer-Aided Design (ICCAD-89): Digest of Technical Papers - Santa Clara, CA, USA
持續時間: 5 11月 19899 11月 1989

出版系列

名字IEEE Int Conf Comput Aided Des ICCAD 89 Dig Tech Pap

Conference

ConferenceIEEE International Conference on Computer-Aided Design (ICCAD-89): Digest of Technical Papers
城市Santa Clara, CA, USA
期間5/11/899/11/89

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