Making optical MEMS sensors more compact using organic light sources and detectors

Thilo Sauter, Wilfried Hortschitz, Harald Steiner, Michael Stifter, Hsin Chiao, Hsiao-Wen Zan, Hsin-Fei Meng, Chang-Po Chao

研究成果: Conference contribution同行評審

6 引文 斯高帕斯(Scopus)

摘要

Vibration and displacement sensors need to be compact for many applications in automation or consumer electronics, and microelectromechanical structures are a convenient way to implement such sensors. For these MEMS devices, optical readout methods have proven to be superior to capacitive or piezoresistive strategies in terms of sensitivity as well as noise and interference immunity, however the integration of light sources and detectors is not easily possible. This paper presents an approach to use organic optoelectronic devices for the readout. OLED and OPD (organic photo detector) are structured on the glass substrate and cover encapsulating the MEMS devices, allowing for a tightly integrated sensor based on vertical light flux modulation by a horizontally moving proof mass. The paper describes the principle sensor structure as well as the fabrication of suitable organic devices. First test results show that the approach is feasible.

原文English
主出版物標題19th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2014
編輯Herminio Martinez Garcia, Antoni Grau
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9781479948468
DOIs
出版狀態Published - 8 1月 2014
事件19th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2014 - Barcelona, 西班牙
持續時間: 16 9月 201419 9月 2014

出版系列

名字19th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2014

Conference

Conference19th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2014
國家/地區西班牙
城市Barcelona
期間16/09/1419/09/14

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