Low temperature epitaxial growth of PZT on conductive perovskite LaNiO 3 electrode for embedded capacitor-over-interconnect (COI) FeRAM application
S. L. Lung, C. L. Liu*, S. S. Chen, S. C. Lai, C. W. Tsai, T. T. Sheng, Ta-Hui Wang, Sam Pan, T. B. Wu, Rich Liu
*此作品的通信作者
研究成果: Conference article › 同行評審
7
引文
斯高帕斯（Scopus）