Low temperature doping of arsenic atoms in silicon during Pd2Si formation

I. Ohdomari*, K. Suguro, M. Akiyama, T. Maeda, King-Ning Tu, I. Kimura, K. Yoneda

*此作品的通信作者

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

指紋

深入研究「Low temperature doping of arsenic atoms in silicon during Pd2Si formation」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds