Low power device technology with SiGe channel, HfSiON, and poly-Si gate

Howard C.H. Wang^*, Shang Jr Chen, Ming Fang Wang, Pang Yen Tsai, Ching Wei Tsai, Ta Wei Wang, Steve M. Ting, Tuo-Hung Hou, Peng Soon Lim, Huan Just Lin, Ying Jin, Hun Jan Tao, Shih Chang Chen, Carlos H. Diaz, Mong Song Liang, Chen-Ming Hu