Low N-Type Contact Resistance to Carbon Nanotubes in Highly Scaled Contacts through Dielectric Doping

Nathaniel Safion^*, Hsin Yuan Chiu, Tzu Ang Chao, Sheng Kai Su, Matthias Passlack, Kuang Hsiang Chiu, Chien Wei Chen, Chi Chung Kei, Chen Han Chou, Tsung En Lee, Jer Fu Wang, Chih Sheng Chang, San Lin Liew, Vincent D.H. Hou, Han Wang, Wen Hao Chang, H. S.Philip Wong, Gregory Pitner, Chao Hsin Chien, Iuliana P. Radu