Low-leakage tetragonal ZrO 2 (EOT < 1 nm) with in situ plasma interfacial passivation on germanium

Chen-Han Chou*, Hao Hsuan Chang, Chung Chun Hsu, Wen Kuan Yeh, Chao-Hsin Chien

*此作品的通信作者

研究成果: Article同行評審

13 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds