Low-I RESET unipolar HfO 2 RRAM and tunable resistive-switching mode via interface engineering

Kuan Liang Lin*, Tuo-Hung Hou, Yao Jen Lee, Jun Hung Lin, Jhe Wei Chang, Jiann Shieh, Cheng Tung Chou, Wen Hsiung Chang, Wen Yueh Jang, Chen Hsi Lin

*此作品的通信作者

    研究成果: Conference contribution同行評審

    2 引文 斯高帕斯(Scopus)

    摘要

    Resistive random access memory (RRAM) has emerged as a promising candidate for next-generation nonvolatile memory (NVM) due to its low-voltage operation, fast switching speed and high-density integration [1]. Two common resistive switching (RS) modes in RRAM are unipolar and bipolar modes [2]. A unipolar RRAM in series with a rectifying diode, so-called one diode-one resistor (1D1R) cell, is particularly attractive for high-density applications because of the minimal 4F 2 cell size [3]. However, high RESET current (I RESET) impedes the cell size scaling in 1D1R array. Recently, we have demonstrated a reliable Ni/HfO 2/Si unipolar RRAM, fully compatible with the Si technology [4, 5]. In this paper, we show that unipolar HfO 2 RRAM exhibits excellent NVM characteristics promising for low-I RESET, low-power operation in the future high-density 1D1R array. In addition, we show that the RS mode can be tailored by a bottom interfacial layer of Al 2O 3 between HfO 2 and Si. New evidence on the location of filament connections/ruptures and RS mechanism will be discussed in details.

    原文English
    主出版物標題2011 International Semiconductor Device Research Symposium, ISDRS 2011
    DOIs
    出版狀態Published - 1 12月 2011
    事件2011 International Semiconductor Device Research Symposium, ISDRS 2011 - College Park, MD, United States
    持續時間: 7 12月 20119 12月 2011

    出版系列

    名字2011 International Semiconductor Device Research Symposium, ISDRS 2011

    Conference

    Conference2011 International Semiconductor Device Research Symposium, ISDRS 2011
    國家/地區United States
    城市College Park, MD
    期間7/12/119/12/11

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