Low energy ion beam assisted deposition of TiN thin films on silicon

J. H. Huang, Chun-Hsiung Lin, C. H. Ma, Haydn Chen

研究成果: Article同行評審

16 引文 斯高帕斯(Scopus)

摘要

TiN thin films were prepared by the ion beam assisted deposition (IBAD) method on Si (100) substrate with the ion energy below 300 Volts. The effect of process parameters, including, ion incident angle, ion energy, and deposition temperature, on the preferred orientation, resistivity and microstructure of the films was examined. The results suggest that the ion-induced defects are the major factor contributing to the change of resistivity of TiN.

原文English
頁(從 - 到)573-579
頁數7
期刊Scripta Materialia
42
發行號6
DOIs
出版狀態Published - 28 2月 2000

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