Localized sealing schemes for MEMS packaging

Yu-Ting Cheng^*, Y. C. Su, Liwei Lin

^*此作品的通信作者

研究成果: Chapter › 同行評審

原文	English
主出版物標題	Mems Packaging
發行者	World Scientific Publishing Co. Pte Ltd
頁面	223-249
頁數	27
ISBN（電子）	9789813229365
ISBN（列印）	9789813229358
DOIs	https://doi.org/10.1142/9789813229365_0011
出版狀態	Published - 3 1月 2018

存取文件

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