Localized joule heating as a mask-free technique for the local synthesis of ZnO nanowires on silicon nanodevices

C. C. Chen, Y. S. Lin, C. H. Sang, Jeng-Tzong Sheu*

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21 引文 斯高帕斯(Scopus)

摘要

We report a mask-free technique for the local synthesis of ZnO nanowires (NWs) on polysilicon nanobelts and polysilicon NW devices. First, we used localized joule heating to generate a poly(methyl methacrylate) (PMMA) nanotemplate, allowing the rapid and self-aligned ablation of PMMA within a short period of time (ca. 5 μs). Next, we used ion-beam sputtering to prepare an ultrathin Au film and a ZnO seed layer; a subsequent lift-off process left the seed layers selectively within the PMMA nanotemplate. Gold nanoparticles and ZnO NWs were formed selectively in the localized joule heating region.

原文English
頁(從 - 到)4736-4741
頁數6
期刊Nano Letters
11
發行號11
DOIs
出版狀態Published - 9 11月 2011

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