Laser velocimetry for measurement of non-sinusoidal vibration in sub-nanometer scale without lock-in amplifiers

How Foo Chen, Rung Fu Lin, Wei Lun Chiang

研究成果: Conference contribution同行評審

摘要

Laser velocimetry capable of measuring nanoscale motion or displacement normal to vibrational surface is always important in industry and scientific applications. However, measurement sensitivity down to sub-nanometer scale is always a challenge, and utilization of lock-in amplifiers is unavoidable. Measurement is then also limited to single-point detection. Here we report a laser Doppler velocimetry capable of non-contact detection in sub-nanometer scale down to sub-Hertz frequency in a Mach-Zehnder configuration without lock-in amplifiers. Environment perturbation in tens of nanometer scale can be removed by empirical mode decomposition. Lack of lock-in amplifiers promises this technology not limited to single-point detection. Downloading of the abstract is permitted for personal use only.

原文English
主出版物標題Nanoengineering
主出版物子標題Fabrication, Properties, Optics, and Devices XII
編輯Elizabeth A. Dobisz, Louay A. Eldada, Eva M. Campo
發行者SPIE
ISBN(電子)9781628417227
DOIs
出版狀態Published - 2015
事件Nanoengineering: Fabrication, Properties, Optics, and Devices XII - San Diego, United States
持續時間: 11 8月 201512 8月 2015

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
9556
ISSN(列印)0277-786X
ISSN(電子)1996-756X

Conference

ConferenceNanoengineering: Fabrication, Properties, Optics, and Devices XII
國家/地區United States
城市San Diego
期間11/08/1512/08/15

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