TY - GEN
T1 - Investigation on thin-film-transistors with a transparent material zinc-oxide layer with DC sputter deposition system
AU - Chou, Yi Teh
AU - Huang, Chen Shuo
AU - Shiau, S. J.
AU - Liu, Po-Tsun
AU - Chu, Li Wei
PY - 2007/7
Y1 - 2007/7
N2 - We have successfully developed a transparent thin film transistor (TTFT) with a novel material Zinc Oxide (ZnO) as semiconductor layer. The use of ZnO-based material can increases the field-effect mobility of TFT devices, the opening of AMLCD panel and releases the issue of photo-excited leakage current. In this work, the ZnO film was deposited in DC glow discharge plasma sputter system which is suitable for industrial technique and novel method in ZnO-base TFT process. With changing mixture gas flow, we can adjust the rate of Zn/ZnO mixture, Zn1+xO, and ZnO and get a suitable condition for TFT device. FTIR, XRD, SEM and AFM were utilized to analyze the characteristic of ZnO films.
AB - We have successfully developed a transparent thin film transistor (TTFT) with a novel material Zinc Oxide (ZnO) as semiconductor layer. The use of ZnO-based material can increases the field-effect mobility of TFT devices, the opening of AMLCD panel and releases the issue of photo-excited leakage current. In this work, the ZnO film was deposited in DC glow discharge plasma sputter system which is suitable for industrial technique and novel method in ZnO-base TFT process. With changing mixture gas flow, we can adjust the rate of Zn/ZnO mixture, Zn1+xO, and ZnO and get a suitable condition for TFT device. FTIR, XRD, SEM and AFM were utilized to analyze the characteristic of ZnO films.
UR - http://www.scopus.com/inward/record.url?scp=56049094137&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:56049094137
SN - 9789572852248
T3 - IDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings
SP - 512
EP - 514
BT - IDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings
T2 - International Display Manufacturing Conference and Exhibition, IDMC 2007
Y2 - 3 July 2007 through 6 July 2007
ER -