@inproceedings{9a0d1aa33a4842079a083c201bd2a8ff,
title = "Investigation on effects of composition on transparent aluminum zinc tin oxide thin-film transistors",
abstract = " We investigated on electrical performance of amorphous AI-Zn-Sn-O thin film transistor (AZTO TFT). The mobility enhanced while the concentration of Sn increased. The improved stability can be attributed to the increase of Sn concentration and enhancement of bonding energy of metal ion with the increase of O 2 gas flow rate. ",
keywords = "AZTO, Transparent metal oxide semiconductor",
author = "Fuh, {Chur Shyang} and Teng, {Li Feng} and Fan, {Yang Shun} and Chang, {Chih Hsiang} and Po-Tsun Liu",
year = "2012",
month = dec,
day = "1",
language = "English",
isbn = "9781627486521",
series = "Proceedings of the International Display Workshops",
pages = "375--377",
booktitle = "Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012",
note = "null ; Conference date: 04-12-2012 Through 07-12-2012",
}
