Investigation of ferroelectric granularity for double-gate negative-capacitance FETs considering position and number fluctuations

Che Lun Fan, Kuei Yang Tseng, You Sheng Liu, Pin Su

研究成果: Conference contribution同行評審

摘要

Using TCAD atomistic simulation, this work investigates the ferroelectric layer granularity of double-gate (DG) negative-capacitance FETs (NCFET) by considering both position and number fluctuations. Our study indicates that the impacts of the ferroelectric ratio on threshold voltage (VT) and subthreshold swing (SS) variations exhibit non-monotonic characteristics, and it is important to include the number fluctuation of the ferroelectric grain to accurately account for the overall variation. In addition, smaller grain size not only reduces the VT and SS variations, but also improves the mean value of the subthreshold swing.

原文English
主出版物標題2019 Silicon Nanoelectronics Workshop, SNW 2019
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9784863487024
DOIs
出版狀態Published - 6月 2019
事件24th Silicon Nanoelectronics Workshop, SNW 2019 - Kyoto, 日本
持續時間: 9 6月 201910 6月 2019

出版系列

名字2019 Silicon Nanoelectronics Workshop, SNW 2019

Conference

Conference24th Silicon Nanoelectronics Workshop, SNW 2019
國家/地區日本
城市Kyoto
期間9/06/1910/06/19

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