Interfacial Layer Engineering to Enhance Noise Immunity of FeFETs for IMC Applications

Yannick Raffel, Sunanda Thunder, Maximilian Lederer, Ricardo Olivo, Raik Hoffmann, Luca Pirro, Sven Beyer, Talha Chohan, Po Tsang Huang, Sourav De*, Thomas Kampfe, Konrad Seidel, Johannes Heitman

*此作品的通信作者

研究成果: Conference contribution同行評審

2 引文 斯高帕斯(Scopus)

摘要

This article reports an improvement in the low- frequency noise characteristics in hafnium oxide-based (HfO2) ferroelectric field-effect transistors (FeFET) by interfacial layer (IL) engineering. FeFET devices with silicon dioxide (SiO2) and silicon oxynitride (SiON) as IL were fabricated and characterised. FeFETs with SiON interfaces demonstrated an excellent improvement in variation, and low-frequency noise characteristics. The wider memory window for operation in FeFETs with SiON IL also allows for a higher noise tolerance during the inference operation. Finally, the evaluation of system performance by neuromorphic simulation shows that FeFET with SiON IL are highly immune to noise degradation and endurance, without retention penalty.

原文English
主出版物標題Proceedings of 2022 IEEE International Conference on IC Design and Technology, ICICDT 2022
編輯Xuan-Tu Tran, Duy-Hieu Bui
發行者Institute of Electrical and Electronics Engineers Inc.
頁面8-11
頁數4
ISBN(電子)9781665459013
DOIs
出版狀態Published - 2022
事件2022 IEEE International Conference on IC Design and Technology, ICICDT 2022 - Hanoi, Viet Nam
持續時間: 21 9月 202223 9月 2022

出版系列

名字Proceedings of 2022 IEEE International Conference on IC Design and Technology, ICICDT 2022

Conference

Conference2022 IEEE International Conference on IC Design and Technology, ICICDT 2022
國家/地區Viet Nam
城市Hanoi
期間21/09/2223/09/22

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