Interface morphology and electrical properties of bonded gaas/gaas wafers at different temperatures

S. C. Chang, Yew-Chuhg Wu, N. Chang

研究成果: Conference contribution同行評審

摘要

The microstructure and electrical properties of p-GaAs/n-GaAs bonded interface were investigated. It was observed that when bonding temperature increased from 600 to 800°C, the thickness of oxide layer decreased. Current-voltage characteristic shows typical diode behaviors in these temperature ranges.

原文English
主出版物標題Semiconductor Wafer Bonding 12
主出版物子標題Science, Technology, and Applications
頁面109-112
頁數4
版本7
DOIs
出版狀態Published - 1 12月 2012
事件12th International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications - ECS Fall 2012 Meeting - Honolulu, HI, United States
持續時間: 7 10月 201212 10月 2012

出版系列

名字ECS Transactions
號碼7
50
ISSN(列印)1938-5862
ISSN(電子)1938-6737

Conference

Conference12th International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications - ECS Fall 2012 Meeting
國家/地區United States
城市Honolulu, HI
期間7/10/1212/10/12

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