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Keyphrases
Ultrathin
100%
Equivalent Oxide Thickness
100%
HfO2
100%
GaSb
100%
MOS Capacitor
100%
Interface Characterization
100%
Hydrogen Plasma Treatment
100%
Gate Leakage Current
28%
In Situ
14%
Capacitors
14%
P-type
14%
Electrical Performance
14%
Flat Surface
14%
Surface Treatment
14%
Atomic Layer Deposition
14%
Etching Process
14%
Passivated
14%
Interface State Density
14%
Dielectric Deposition
14%
Chemical Solution
14%
Forming Gas Annealing
14%
High-permittivity
14%
Ultrathin Dielectrics
14%
Remote Hydrogen Plasma
14%
Engineering
Oxide Thickness
100%
Plasma Treatment
100%
Interface State
25%
Dielectrics
25%
Electrical Performance
25%
Interlayer
25%
Atomic Layer Deposition
25%
Etching Process
25%
Flat Surface
25%
Material Science
Oxide Compound
100%
Capacitor
100%
Density
25%
Permittivity
25%
Solution (Chemistry)
25%
Surface (Surface Science)
25%
Dielectric Material
25%
Physics
Hydrogen Plasma
100%
Flat Surface
33%
Permittivity
33%
Dielectric Material
33%
Atomic Layer Epitaxy
33%