Intelligent reticle modification enabled large-area metalens patterning

Keyphrases

• Device Performance 33%
• Dielectric Metalens 33%
• Diffraction-limited Focusing 33%
• High Volume Manufacturing 33%
• Metalens 100%
• Metasurface 33%
• Nanostructures 33%
• Neural Network 33%
• Optical Proximity Effect 33%
• Optoelectronic Applications 33%
• Pattern-based 33%
• Photolithography 66%
• Reticle 100%
• Semiconductor Process 33%
• Shape Fidelity 33%
• Size-and-shape 33%
• U-Net 33%

Engineering

• Device Performance 50%
• Dielectrics 50%
• Metasurface 50%
• Nanomaterial 50%
• Optical Lithography 100%
• Optoelectronics 50%
• Proximity Effect 50%

Material Science

• Dielectric Material 100%
• Nanostructure 100%