Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems

Yi Chiu*, Chung Wei Wu, Zhi Wei Zhuang, Jin-Chern Chiou, Han Ping D. Shieh

*此作品的通信作者

研究成果: Conference contribution同行評審

原文English
主出版物標題IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
頁面140-141
頁數2
DOIs
出版狀態Published - 1 12月 2006
事件IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
持續時間: 21 8月 200624 8月 2006

出版系列

名字IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
國家/地區United States
城市Big Sky, MT
期間21/08/0624/08/06

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