Integration of microwave-annealed oxidation on germanium metal-oxide-semiconductor devices

Chung Chun Hsu, Wei Chun Chi, Yi He Tsai, Ming Li Tsai, Shin Yuan Wang, Chen Han Chou, Jun Lin Zhang, Guang Li Luo, Chao-Hsin Chien*

*此作品的通信作者

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds