Integration of 2.4GHz RF transmitter with accelerometer for mobile sensing applications on 1P6M ASIC compatible CMOS MEMS process

Pao Min Chu, Kuei-Ann Wen

    研究成果: Conference contribution同行評審

    摘要

    A novel design to combine RF transmitter as well as sensor monolithically has been proposed. A 2.4GHz RF transmitter is integrated with a single axis accelerometer. The two port spiral transformer of which the secondary inductor is designed to be suspended with MEMS structure. The mutual inductance of the transformer will be changed due to displacement of the proof mass. The magnetic flux variation can be sensed by demodulation signal and the measured sensitivity is 11.8 Hz/g.

    原文English
    主出版物標題2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings
    發行者Institute of Electrical and Electronics Engineers Inc.
    頁面33-36
    頁數4
    ISBN(電子)9781538652831
    DOIs
    出版狀態Published - 3 10月 2018
    事件13th IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Kuala Lumpur, Malaysia
    持續時間: 15 8月 201817 8月 2018

    出版系列

    名字IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
    2018-August

    Conference

    Conference13th IEEE International Conference on Semiconductor Electronics, ICSE 2018
    國家/地區Malaysia
    城市Kuala Lumpur
    期間15/08/1817/08/18

    指紋

    深入研究「Integration of 2.4GHz RF transmitter with accelerometer for mobile sensing applications on 1P6M ASIC compatible CMOS MEMS process」主題。共同形成了獨特的指紋。

    引用此