Integration issues for siloxane-based hydrogen silsesquioxane (HSQ) applied on TFT-LCDs

Keyphrases

• Thin-film Transistors 100%
• Hydrogen Silsesquioxane 100%
• Integration Challenges 100%
• Siloxane 100%
• Dielectric 33%
• Passivation 33%
• Time Delay 33%
• Low-k Materials 33%
• TFT-LCD 33%
• Passivation Layer 33%
• Nitride Films 33%
• Electric 33%
• Transistor Level 33%
• Transistor Array 33%
• Pixel Level 33%
• Visible Light Illumination 33%
• Low-k Dielectric Films 33%
• RC Time 33%

Material Science

• Thin-Film Transistor 100%
• Silsesquioxane 100%
• Film 33%
• Transistor 33%
• Nitride Compound 33%
• Liquid Crystal Display 33%
• Dielectric Films 33%
• Dielectric Material 33%