@inproceedings{cb2b83e28d07495baa71f7be96595347,
title = "Integration design of wide-dynamic-range MEMS magnetometer and oscillator",
abstract = "This paper presents a Lorentz current-based MEMS magnetometer integrated with MEMS oscillator. The auto capacitance offset calibration magnetometer can achieve a tunable sensitivity from 12 to 2.94×106 T/V and eliminate the capacitance mismatch caused by process variation under 0.084fF by SAR calibrator. The natural frequency of proposed differential oscillator is around 18.8 kHz, Q-factor of 183 under the bias voltage 20 V and at 760Torr ambient pressure. The proposed biasing method of oscillator obtains a frequency tuning range of 58510 ppm, resulting in a wide-dynamic-range which is about 107.8dB. FOM of the oscillator design is 4.75×1020 Hz2Ω2. The integrated magnetometer and oscillator is implemented in 1P6M ASIC compatible CMOS MEMS process.",
keywords = "differential oscillator, magnetometer, MEMS, wide-dynamic-range",
author = "Song, {Chao Hung} and Kuei-Ann Wen",
year = "2018",
month = oct,
day = "3",
doi = "10.1109/SMELEC.2018.8481282",
language = "English",
series = "IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "17--20",
booktitle = "2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings",
address = "United States",
note = "null ; Conference date: 15-08-2018 Through 17-08-2018",
}