Integrated metasurfaces on silicon photonics for emission shaping and holographic projection

Ping Yen Hsieh, Shun Lin Fang, Yu Siang Lin, Wen Hsien Huang, Jia Min Shieh, Peichen Yu, You Chia Chang*


研究成果: Article同行評審


The emerging applications of silicon photonics in free space, such as LiDARs, free-space optical communications, and quantum photonics, urge versatile emission shaping beyond the capabilities of conventional grating couplers. In these applications, silicon photonic chips deliver free-space emission to detect or manipulate external objects. Light needs to emit from a silicon photonic chip to the free space with specific spatial modes, which produce focusing, collimation, orbital angular momentum, or even holographic projection. A platform that offers versatile shaping of free-space emission, while maintaining the CMOS compatibility and monolithic integration of silicon photonics is in pressing need. Here we demonstrate a platform that integrates metasurfaces monolithically on silicon photonic integrated circuits. The metasurfaces consist of amorphous silicon nanopillars evanescently coupled to silicon waveguides. We demonstrate experimentally diffraction-limited beam focusing with a Strehl ratio of 0.82. The focused spot can be switched between two positions by controlling the excitation direction. We also realize a meta-hologram experimentally that projects an image above the silicon photonic chip. This platform can add a highly versatile interface to the existing silicon photonic ecosystems for precise delivery of free-space emission.

頁(從 - 到)4687-4695
出版狀態Published - 1 12月 2022


深入研究「Integrated metasurfaces on silicon photonics for emission shaping and holographic projection」主題。共同形成了獨特的指紋。