@inproceedings{484a22dc8a75443fa358cdef7bac300b,
title = "Integrated accelerometer with capacitance to digital interface circuit design based on monolithic 0.18μm CMOS MEMS technology",
abstract = "A monolithic accelerometer with integrated capacitance to digital readout circuit implemented in mixed-signal MEMS process is proposed to demonstrate sensor-to-bit integration. The sensing range is from -5g to 5g and the variation of the capacitance is from 441.2fF to 470fF. The sensitivity of the accelerometer is 2.88fF/g. The capacitance value of the sensing range is readout by the capacitance to digital circuit to readout. The capacitance to time circuit of the sensitivity is 6.94us/pF which is equivalent to 20ns/1bit. The digital output can be obtained without analog to digital module, and thus with power saving advantage, the output signal can be directly interface to digital signal process.",
author = "Wang, {Chun Chieh} and Fan, {Long Sheng} and Kuei-Ann Wen",
year = "2012",
month = dec,
day = "1",
doi = "10.1109/ICSENS.2012.6411551",
language = "English",
isbn = "9781457717659",
series = "Proceedings of IEEE Sensors",
booktitle = "IEEE SENSORS 2012 - Proceedings",
note = "null ; Conference date: 28-10-2012 Through 31-10-2012",
}