@article{2b413db076074b9eb452feca17f9728a,
title = "Inhibition of bird's beak in LOCOS by new buffer N2O oxide",
abstract = "In the Letter new N2O buffer oxide was used to replace the conventional dry oxide for LOCOS isolation. This new structure can result in a shorter bird's, beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate.",
keywords = "Oxidation, Silicon",
author = "Tien-Sheng Chao and Cheng, {J. Y.} and Lei, {T. F.}",
year = "1995",
month = feb,
day = "16",
doi = "10.1049/el:19950208",
language = "English",
volume = "31",
pages = "323--324",
journal = "Electronics Letters",
issn = "0013-5194",
publisher = "Institution of Engineering and Technology",
number = "4",
}