Inhibition of bird's beak in LOCOS by new buffer N2O oxide

Tien-Sheng Chao, J. Y. Cheng, T. F. Lei

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

摘要

In the Letter new N2O buffer oxide was used to replace the conventional dry oxide for LOCOS isolation. This new structure can result in a shorter bird's, beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate.

原文English
頁(從 - 到)323-324
頁數2
期刊Electronics Letters
31
發行號4
DOIs
出版狀態Published - 16 2月 1995

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