Influence of rf sputter power on ZnO film characteristics for transparent memristor devices

Firman Mangasa Simanjuntak*, Takeo Ohno, Seiji Samukawa

*此作品的通信作者

研究成果: Article同行評審

23 引文 斯高帕斯(Scopus)

摘要

The impact of the radio-frequency (rf) sputtering power on the switching characteristics of ZnO-based transparent memristor devices has been investigated. Memristor devices made with a high rf power exhibited excellent switching characteristics; meanwhile, decreasing the rf power led to less-apparent switching behavior and increased likelihood of device breakdown. However, high rf power memristors exhibited a reduced switching uniformity as the rf power significantly affected the defect concentration as well as the microstructure of the deposited ZnO films, which determine the switching characteristics and performance of memristor devices.

原文English
文章編號105216
期刊AIP Advances
9
發行號10
DOIs
出版狀態Published - 1 10月 2019

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