Inductive-coupling-nitrogen-plasma process for suppression of boron penetration in BF2+-implanted polycrystalline silicon gate

Tien-Sheng Chao; C. H. Chu

doi:10.1063/1.119304

Inductive-coupling-nitrogen-plasma process for suppression of boron penetration in BF₂⁺-implanted polycrystalline silicon gate

Tien-Sheng Chao^*, C. H. Chu

^*此作品的通信作者

電子物理學系

研究成果: Article › 同行評審

3 引文斯高帕斯（Scopus）

摘要

A novel and simple method to suppress the boron penetration in the BF₂⁺-implanted polycrystalline silicon gate is presented by using the inductive-coupling-nitrogen-plasma (ICNP) process. A nitrogen layer was found at the SiO₂/Si interface by using this method. The result shows that the sample with the ICNP treatment exhibits a good suppression of boron penetration and improved electrical characteristics.

原文	English
頁（從 - 到）	55-56
頁數	2
期刊	Applied Physics Letters
卷	70
發行號	1
DOIs	https://doi.org/10.1063/1.119304
出版狀態	Published - 6 1月 1997

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10.1063/1.119304

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abstract = "A novel and simple method to suppress the boron penetration in the BF2+-implanted polycrystalline silicon gate is presented by using the inductive-coupling-nitrogen-plasma (ICNP) process. A nitrogen layer was found at the SiO2/Si interface by using this method. The result shows that the sample with the ICNP treatment exhibits a good suppression of boron penetration and improved electrical characteristics.",

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AB - A novel and simple method to suppress the boron penetration in the BF2+-implanted polycrystalline silicon gate is presented by using the inductive-coupling-nitrogen-plasma (ICNP) process. A nitrogen layer was found at the SiO2/Si interface by using this method. The result shows that the sample with the ICNP treatment exhibits a good suppression of boron penetration and improved electrical characteristics.

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Inductive-coupling-nitrogen-plasma process for suppression of boron penetration in BF2+-implanted polycrystalline silicon gate

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Inductive-coupling-nitrogen-plasma process for suppression of boron penetration in BF₂⁺-implanted polycrystalline silicon gate