Indium Zinc Oxide Nanosheet Transistor with 2 nm Channel Thickness for Monolithic Three-Dimensional Integrated Circuit

Zhen Hao Li, Tsung Che Chiang, Yu Chen Chen, Hsin Hua Lee, Yu Ting Tsai, Po Tsun Liu*

*此作品的通信作者

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds