Increase in the Efficiency of III-Nitride Micro-LEDs: Atomic-Layer Deposition and Etching

An Chen Liu, Konthoujam James Singh, Yu Ming Huang, Tanveer Ahmed, Fang Jyun Liou, Yu Hau Liou, Chao Cheng Ting, Chien-Chung Lin, Yi-Ming Li, Seiji Samukawa, Hao-Chung Kuo