Improvements of Fermi-level pinning and NBTI by fluorinated HfO 2-CMOS

Chao Sung Lai, Woei Cherng Wu, Huai Hsien Chiu, Jer Chyi Wang, Pai Chi Chou, Tien-Sheng Chao*

*此作品的通信作者

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)

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Engineering & Materials Science