Improvement on CDM ESD robustness of high-voltage tolerant nLDMOS SCR devices by using differential doped gate

S. H. Chen, D. Linten, M. Scholz, G. Hellings, R. Boschke, G. Groeseneken, Y. C. Huang, Ming-Dou Ker

    研究成果: Conference contribution同行評審

    2 引文 斯高帕斯(Scopus)

    摘要

    Early failure has been observed during CDM ESD stress on high-voltage tolerant nLDMOS-SCR devices in a standard low-voltage CMOS technology due to the gate oxide (GOX) degradation. In this work, we propose a special p+/n+ differential doped gate which boosts the CDM ESD failure current level with a factor of 3 to 9.

    原文English
    主出版物標題2014 IEEE International Reliability Physics Symposium, IRPS 2014
    發行者Institute of Electrical and Electronics Engineers Inc.
    ISBN(列印)9781479933167
    DOIs
    出版狀態Published - 1 1月 2014
    事件52nd IEEE International Reliability Physics Symposium, IRPS 2014 - Waikoloa, HI, United States
    持續時間: 1 6月 20145 6月 2014

    出版系列

    名字IEEE International Reliability Physics Symposium Proceedings
    ISSN(列印)1541-7026

    Conference

    Conference52nd IEEE International Reliability Physics Symposium, IRPS 2014
    國家/地區United States
    城市Waikoloa, HI
    期間1/06/145/06/14

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