Improvement in Integration Issues for Organic Low-k Hybrid-Organic-Siloxane-Polymer

Po-Tsun Liu*, Ting Chang Chang, Hsing Su, Yi Shian Mor, Ya Liang Yang, Henry Chung, Jan Hou, Simon M. Sze

*此作品的通信作者

研究成果: Article同行評審

41 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds