Improved performance of F-ions-implanted poly-Si thin-film transistors using solid phase crystallization and excimer laser crystallization
- Chun Hao Tu*
- , Ting Chang Chang
- , Po-Tsun Liu
- , Che Yu Yang
- , Li Wei Feng
- , Chia Chou Tsai
- , Li Ting Chang
- , Yung Chun Wu
- , Simon M. Sze
- , Chun-Yen Chang
*此作品的通信作者
研究成果: Article › 同行評審
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引文
斯高帕斯（Scopus）