Improved performance of F-ions-implanted poly-Si thin-film transistors using solid phase crystallization and excimer laser crystallization

Chun Hao Tu*, Ting Chang Chang, Po-Tsun Liu, Che Yu Yang, Li Wei Feng, Chia Chou Tsai, Li Ting Chang, Yung Chun Wu, Simon M. Sze, Chun-Yen Chang

*此作品的通信作者

研究成果: Article › 同行評審

5 引文 斯高帕斯（Scopus）

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Keyphrases

Material Science

Engineering