Improved current drivability and poly-gate depletion of submicron PMOSFET with poly-SiGe gate and ultra-thin nitride gate dielectric

C. H. Chen, Y. K. Fang*, C. W. Yang, S. F. Ting, Y. S. Tsair, C. N. Chang, Tuo-Hung Hou, M. F. Wang, M. C. Yu, C. L. Lin, S. C. Chen, C. H. Yu, M. S. Liang

*此作品的通信作者

研究成果: Article同行評審

4 引文 斯高帕斯(Scopus)

摘要

The electrical properties of poly-SiGe gated PMOSFETs have been investigated and compared to the conventional poly-Si gated device. Both types of PMOSFETs use ultra-thin nitride gate dielectric. Poly-SiGe gated devices exhibit 10% higher inversion capacitance, improved subthreshold properties, and superior current drivability. The improvements are contributed to the suppression of the poly-gated depletion effect and the enhanced carrier mobility.

原文English
頁(從 - 到)597-599
頁數3
期刊Solid-State Electronics
46
發行號4
DOIs
出版狀態Published - 1 4月 2002

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