Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures

Yi Fan Huang*, Surojit Chattopadhyay, Yi Jun Jen, Cheng Yu Peng, Tze An Liu, Yu Kuei Hsu, Ci Ling Pan, Hung Chun Lo, Chih Hsun Hsu, Yuan Huei Chang, Chih Shan Lee, Kuei Hsien Chen, Li Chyong Chen


研究成果: Article同行評審

959 引文 斯高帕斯(Scopus)


Nature routinely produces nanostructured surfaces with useful properties, such as the self-cleaning lotus leaf, the colour of the butterfly wing, the photoreceptor in brittlestar and the anti-reflection observed in the moth eye. Scientists and engineers have been able to mimic some of these natural structures in the laboratory and in real-world applications. Here, we report a simple aperiodic array of silicon nanotips on a 6-inch wafer with a sub-wavelength structure that can suppress the reflection of light at a range of wavelengths from the ultraviolet, through the visible part of the spectrum, to the terahertz region. Reflection is suppressed for a wide range of angles of incidence and for both s- and p-polarized light. The antireflection properties of the silicon result from changes in the refractive index caused by variations in the height of the silicon nanotips, and can be simulated with models that have been used to explain the low reflection from moth eyes. The improved anti-reflection properties of the surfaces could have applications in renewable energy and electro-optical devices for the military.

頁(從 - 到)770-774
期刊Nature nanotechnology
出版狀態Published - 12月 2007


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