Improve the electrical properties of NILC poly-Si films using a gettering substrate

Keyphrases

• Electrical Properties 100%
• Ni Metal 100%
• Metal-induced Crystallization 100%
• Polycrystalline Silicon Film 100%
• Gettering 100%
• Wafer 33%
• Polycrystalline Silicon Thin-film Transistors (poly-Si TFTs) 33%
• Leakage Current 33%
• Device Performance 33%
• NiSi2 33%
• Amorphous Crystallization 33%
• Amorphous Silicon 33%
• Gettering Process 33%
• Ni Impurity 33%

Material Science

• Film 100%
• Silicon 100%
• Gettering 100%
• Thin-Film Transistor 33%
• Amorphous Silicon 33%