Improve the electrical properties of NILC poly-Si films using a gettering substrate

Yew-Chuhg Wu, Chen-Ming Hu, Chi Ching Lin

研究成果: Conference contribution › 同行評審

指紋

深入研究「Improve the electrical properties of NILC poly-Si films using a gettering substrate」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Chemical Compounds