Implementation of film profile engineering in the fabrication of ZnO thin-film transistors

Keyphrases

• ZnO Thin Film Transistor 100%
• Film Profile Engineering 100%
• On-state Current 50%
• Thin-film Transistors 50%
• Channel Length 50%
• Deposited Film 50%
• Current Ratio 50%
• Gate Oxide 50%
• Device Characteristics 50%
• Steep Subthreshold Swing 50%
• Sub-micrometer 50%
• Small Variation 50%
• Channel Dimensions 50%
• Masking Scheme 50%
• High Mobility 50%
• Oxide-based 50%
• Hanging 50%
• Engineering Concepts 50%
• Film Profile 50%
• Suspended Bridge 50%

Engineering

• Engineering 100%
• Thin-Film Transistor 100%
• Deposited Film 33%
• Channel Length 33%
• Gate Oxide 33%
• Current Ratio 33%
• Channel Dimension 33%

Material Science

• Film 100%
• Thin-Film Transistor 100%
• ZnO 100%
• Oxide Compound 50%