Impacts of surface nitridation on crystalline ferroelectric phase of Hf1-xZrxOand ferroelectric FET performance

Yi Jan Lin, Chih Yu Teng, Chen-Ming Hu, Chun-Jung Su, Yuan-Chieh Tseng*

*此作品的通信作者

研究成果: Article同行評審

12 引文 斯高帕斯(Scopus)

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Physics & Astronomy